MICRO FLUID SYSTEM SUPPORT UNIT AND MANUFACTURING METHOD THEREOF

• Main Authors: ARIKE SHIGEHARU, NAKASO AKISHI, KAWAZOE HIROSHI
• Format: Patent
• Language: English
• Published: 19.01.2010
• Subjects: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; THEIR RELEVANT APPARATUS; TRANSPORTING

A micro fluid system support unit includes a first support body (2), a first adhesive layer (1a) arranged on the surface of the first support body (2), a first hollow filament group consisting of a plurality of hollow filaments (501 to 508) arranged with an arbitrary shape on the surface of the first adhesive layer (1a), a second hollow filament group consisting of a plurality of hollow filaments (511 to 518) arranged in the direction orthogonal to the first hollow filament group, a second adhesive layer (1b) arranged on the surface of the second hollow filament group, and a second support body (6) arranged on the surface of the second adhesive layer (1b). The first and the second hollow filament group constitute a flow passage layer.