TRAP DEVICE AND REDUCED PRESSURE DRYING APPARATUS

• Main Authors: FURUIE TAKAHIRO, CHINJU TAKAYUKI, MIZOSAKI KENGO
• Format: Patent
• Language: English
• Published: 13.01.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: A trap device and reduced pressure drying apparatus are provided to prevent the stay and the leakage of a liquid at a lower part of the discharge line by separating a discharge gas from a vacuum pump efficiently. CONSTITUTION: A tank(120) has a vertical cylindrical shape. An inside vertical cylindrical body(122) is installed at the center of the inside of the tank. The inside vertical cylindrical body has an external diameter smaller than inside diameter of the tank. The inside vertical cylindrical body has an entrance(122a) arranged on the neighborhood of the bottom surface of the tank and an exit(122b) connected to the outside exhaust duct(102) of the downstream side of the tank. A gas introduction portion(126) is arranged a place higher than entrance of the inside vertical cylindrical body and receives a discharge gas from the vacuum pump inside the tank. The exhaust gas is introduced from the gas introduction portion to the inside of the tank. The exhaust gas is raised along the inner wall surface of the tank to the spiral shape to the ceiling.