PREHEATING APPARATUS FOR RESIN MOLDING SYSTEM
PURPOSE: A pre-heating device for a semiconductor device resin molding system is provided to improve production yield by preventing damage to the semiconductor device. CONSTITUTION: A pre-heating device for a semiconductor device resin molding system comprises a pre-heating plate(320), a detecting s...
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Main Author | |
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Format | Patent |
Language | English |
Published |
06.01.2010
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A pre-heating device for a semiconductor device resin molding system is provided to improve production yield by preventing damage to the semiconductor device. CONSTITUTION: A pre-heating device for a semiconductor device resin molding system comprises a pre-heating plate(320), a detecting sensor, and a control part. A semiconductor device is settled on the pre-heating plate, and then preheated. The detecting sensor detects whether existence of the semiconductor device loaded on the pre-heating plate or not. The control part stops the pre-heating device according to the detected result of the detecting sensor, and then reactivates. |
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Bibliography: | Application Number: KR20080060118 |