APPARATUS AND METHOD FOR MEASURING ELECTROMIGRATION

PURPOSE: An apparatus and a method for measuring electromigration are provided to increase the reliability of measurement by minimizing joule's heat in measuring an electromigration. CONSTITUTION: In a device, a test block(120) includes a plurality of specimens(DUT1~DUT20). The specimens are co...

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Bibliographic Details
Main Authors JOO, YOUNG CHANG, KIM, BYOUNG JOON, YOU, HA YOUNG
Format Patent
LanguageEnglish
Published 24.12.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: An apparatus and a method for measuring electromigration are provided to increase the reliability of measurement by minimizing joule's heat in measuring an electromigration. CONSTITUTION: In a device, a test block(120) includes a plurality of specimens(DUT1~DUT20). The specimens are connected with each other in series. Bypass switch(BPSW1~BPSW20) are connected to specimens in parallel. The test block is connected to a pulse generator(124a). The first pulse generation switch(PGSW1) control connection between the test block and the pulse generators(on). The secondary pulse generation switch(PGSW2) controls connection between the test unit and the ground according to connection between of the pulse generator and the test unit. The pulse generator supplies signal to apply current of a pulse wave form to the specimens.
Bibliography:Application Number: KR20080056563