APPARATUS FOR GUIDING A WAFER RING

• Main Authors: BANG, HO CHEON, KIM, BYUNG GEUN
• Format: Patent
• Language: English; Korean
• Published: 28.10.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE: An apparatus for guiding a wafer ring is provided to shorten the time to be required to the arrangement of a wafer ring by arranging the center of wafer ring to the pre-set transfer path. CONSTITUTION: An apparatus for guiding a wafer ring comprises a support(110), a fixed guide rail(120),...