APPARATUS FOR GUIDING A WAFER RING

PURPOSE: An apparatus for guiding a wafer ring is provided to shorten the time to be required to the arrangement of a wafer ring by arranging the center of wafer ring to the pre-set transfer path. CONSTITUTION: An apparatus for guiding a wafer ring comprises a support(110), a fixed guide rail(120),...

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Bibliographic Details
Main Authors BANG, HO CHEON, KIM, BYUNG GEUN
Format Patent
LanguageEnglish
Korean
Published 28.10.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: An apparatus for guiding a wafer ring is provided to shorten the time to be required to the arrangement of a wafer ring by arranging the center of wafer ring to the pre-set transfer path. CONSTITUTION: An apparatus for guiding a wafer ring comprises a support(110), a fixed guide rail(120), and an arrangement guide rail(130). The support is arranged to be adjacent to the transfer path of wafer ring. The fixed guide rail is arranged on the support and is extended parallel to the transfer path of wafer ring, and guides one side edge site of wafer ring. The arrangement guide rail is arranged on the support to be faced with the fixed guide rail and guides the other side edge site of a wafer ring.
Bibliography:Application Number: KR20080037804