UTILITY FLOW CONTROLLER OF SEMICONDUCTOR EQUIPMENT

PURPOSE: A utility flow rate control device of a semiconductor manufacturing facility is provided to control a utility gas of an output module and ion deionized water of a flow rate controller. CONSTITUTION: A controller of a system control part for controlling a system of a semiconductor manufactur...

Full description

Saved in:
Bibliographic Details
Main Authors LEE, YOUNG IL, LEE, HEUNG RYUL
Format Patent
LanguageEnglish
Korean
Published 19.10.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: A utility flow rate control device of a semiconductor manufacturing facility is provided to control a utility gas of an output module and ion deionized water of a flow rate controller. CONSTITUTION: A controller of a system control part for controlling a system of a semiconductor manufacturing device includes a plurality of photo couplers(PT1~PT16), a plurality of comparators(21~28), a central processing unit part(20), an output control part(57), a communication control part(58), and a timer(56). The photo couplers detect a current of signals inputted through an input module, and change the current into contact signals. The comparators compare identity of the contact signals. The central processing unit part receives an input signal inputted in the comparators, and controls the output control part. The output control part receives a command of the central processing unit part, and controls a DC voltage supplied to an output module.
Bibliography:Application Number: KR20080034095