THE METHOD OF MULTI-VARIATE PARAMETER CONTROL LIMIT BY YIELD MANAGEMENT

A method for setting a management limit line of a multivariate factor is provided to maintain stable yield and improve productivity by obtaining a desired process result. A relationship between one or more independent variables and a dependent variable is derived. The independent variable is monitor...

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Bibliographic Details
Main Authors KOO, HEUNG SEOB, LEE, JAE KEUN
Format Patent
LanguageEnglish
Published 15.07.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A method for setting a management limit line of a multivariate factor is provided to maintain stable yield and improve productivity by obtaining a desired process result. A relationship between one or more independent variables and a dependent variable is derived. The independent variable is monitoring data or a representative value of the monitoring data as to the factors according to a work instruction sheet. The dependent variable is the measured data or the yield data for checking a result of a process. The influence on a process result or yield according to an FDC parameter is derived using the coefficient or weight(S26). In order to manage adequate yield, a management limit line is set as to every factor(S32,S33).
Bibliography:Application Number: KR20080003637