DEVICES, SYSTEMS, AND METHODS FOR CARBONATION OF DEIONIZED WATER

Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconduc...

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Bibliographic Details
Main Authors BRAMMER ULRICH, LOHR JOACHIM, SEIWERT JOHANNES, GOTTSCHALK CHRISTIANE
Format Patent
LanguageEnglish
Korean
Published 01.07.2009
Subjects
CHEMISTRY
METALLURGY
MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Summary:Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.
Bibliography:Application Number: KR20097007875