SYSTEM FOR EXPOSURE, METHOD FOR FORMING PATTERN, METHOD FOR CHANNEL, METHOD FOR HOLE, LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
The present invention relates a method for forming a pattern includes the steps of forming a thin film on a substrate, coating a photoresist film on the thin film, aligning a mask over the photoresist film, the mask formed on a base material, including a light shielding portion having a linear suppo...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
06.05.2009
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates a method for forming a pattern includes the steps of forming a thin film on a substrate, coating a photoresist film on the thin film, aligning a mask over the photoresist film, the mask formed on a base material, including a light shielding portion having a linear supporting portion and an uneven portion at a boundary of the supporting portion, and a transmission portion defined at regions excluding the light shielding portion, exposing the photoresist film with the mask thereon to a UV beam of a wavelength greater than 300nm to cause refraction in the vicinity of the uneven portion, and developing the photoresist film exposed thus to form a photoresist film pattern, and patterning the thin film by using the photoresist film pattern thus formed. |
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Bibliography: | Application Number: KR20070108674 |