SCANNING OPTICAL MEASUREMENT APPARATUS HAVING SUPER RESOLUTION

• Main Authors: KIM, DAE GEUN, PARK, SEUNG HAN, AHN, HONG GYU, LEE, EUNG JANG
• Format: Patent
• Language: English
• Published: 28.04.2009
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

A scanning optical measurement apparatus having super resolution is provided to observe desired local area with super resolution by scanning the relatively wide area of a checked object at high speed. A scanning optical measurement apparatus having super resolution comprises: a first pinhole(7) arranged next to a first lens(5); a second lens(9) emitting the light passing through the first pinhole; a scanning unit scanning the light passed through the second lens; a first beam splitter(30) arranged between the second lens and the scanning unit; a scanning unit(34) arranging the light, emitted from the scanning unit, to a first route; an objective lens(18) focusing the light passing through the scanning unit on a checked object; an optical probe(22) reflecting the light passed through the checked object; a second beam splitter(16) arranged between the scanning unit and the objective lens; and a first optical detector(49) detecting the light which is reflected in the checked object and the optical probe and is passed through the first beam splitter.