METHOD OF TESTING SEMICONDUCTOR DEVICE

A method of testing a semiconductor device is provided to place test trays inside a test chamber in a horizontal direction, thereby continuously performing test processes and reducing time spent for loading or unloading the test trays. The first test tray(30a) in which the first semiconductor device...

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Bibliographic Details
Main Author PARK, SUNG HARK
Format Patent
LanguageEnglish
Published 25.03.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A method of testing a semiconductor device is provided to place test trays inside a test chamber in a horizontal direction, thereby continuously performing test processes and reducing time spent for loading or unloading the test trays. The first test tray(30a) in which the first semiconductor devices are contained is loaded to a test chamber(124). The first test tray is located inside the test chamber in a horizontal direction. The first test tray is connected to a tester. The first semiconductor devices are tested by applying a test signal provided from the tester to the first semiconductor devices through signal lines of the first test tray. The first test tray is unloaded from the test chamber. If the test process about the first semiconductor devices is terminated, a test process about the second semiconductor devices contained in the second test tray(30b) is started.
Bibliography:Application Number: KR20070095719