INTEGRATED MICRO FUEL CELL APPARATUS
A micro fuel cell and method of forming such includes depositing multiple layers (22) of alternating metals over a substrate (12); etching at least one metal from the multiple layers (22) creating a void between the remaining layers; forming a plurality of pedestals (28) in the multiple layers (22),...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
08.10.2008
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Subjects | |
Online Access | Get full text |
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Summary: | A micro fuel cell and method of forming such includes depositing multiple layers (22) of alternating metals over a substrate (12); etching at least one metal from the multiple layers (22) creating a void between the remaining layers; forming a plurality of pedestals (28) in the multiple layers (22), each pedestal (28) having a center anode (29) portion and a concentric cathode (31) portion separated by a concentric cavity (31); filling the concentric cavity (31) with an electrolyte; and capping the center anode (29) portion and the concentric cavity (31). |
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Bibliography: | Application Number: KR20087020962 |