EPOXY FORMULATIONS FOR USE IN LITHOGRAPHY TECHNIQUES
A method for preparing a patterned feature includes the steps of I) casting a curable silicone composition against a master, II) curing the curable silicone composition to form a silicone mold, II) separating the master and the silicone mold, IV) filling a silicone mold having a patterned surface wi...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
24.09.2008
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Subjects | |
Online Access | Get full text |
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Summary: | A method for preparing a patterned feature includes the steps of I) casting a curable silicone composition against a master, II) curing the curable silicone composition to form a silicone mold, II) separating the master and the silicone mold, IV) filling a silicone mold having a patterned surface with a curable epoxy formulation; V) curing the curable epoxy formulation to form a patterned feature; VI) separating the silicone mold and the patterned feature; optionally VIII) etching the patterned feature; optionally IX) cleaning the silicone mold; and optionally X) repeating steps IV) to IX) reusing the silicone mold. |
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Bibliography: | Application Number: KR20087018407 |