EQUIPMENT AND METHOD FOR CHECKING WAFER OF SEMICONDUCTOR MANUFACTURE DEVICE TREREOF

A wafer checking device for a semiconductor manufacturing device and a checking method thereof are provided to minimize the generation of badness by forming a controller for displaying a normal or abnormal condition and separating a defect wafer. A wafer checking device for a semiconductor manufactu...

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Bibliographic Details
Main Authors RHEEM, BYEONG KI, KIM, DUK GEUM, YUN, KI YOUNG, LEE, BEUNG KEUN, HAN, SUNG GUN, CHO, KYOUNG OK, KIM, SUNG RAE
Format Patent
LanguageEnglish
Published 30.07.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A wafer checking device for a semiconductor manufacturing device and a checking method thereof are provided to minimize the generation of badness by forming a controller for displaying a normal or abnormal condition and separating a defect wafer. A wafer checking device for a semiconductor manufacturing device comprises a wafer handler part(16) transferring a loaded wafer, a wafer handler control part(14) controlling the wafer handler part, a wafer reading section(18), a controller(20), and a display part(22). The wafer reading section reads the badness of the wafer transferred from the wafer handler part. The controller controls to display a normal or abnormal condition by receiving a wafer reading signal from the wafer reading section, and to separate a defect wafer. The display part displays the normal or abnormal condition of the wafer by control of the controller.
Bibliography:Application Number: KR20070007700