SEMICONDUCOR WAFER EXAMINING APPARATUS

An apparatus for inspecting semiconductor wafers is provided to prevent productivity reduction due to the damage of wafers by selecting wafers having chipping defects using sensor and light emitting units. An apparatus for inspecting semiconductor wafers includes a main body(110), a rotation roller(...

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Bibliographic Details
Main Authors CHOI, BONG, LEE, SNAG YEOUL, YOUN, HAE KEUN, WOO, CHANG WOO
Format Patent
LanguageEnglish
Published 08.07.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:An apparatus for inspecting semiconductor wafers is provided to prevent productivity reduction due to the damage of wafers by selecting wafers having chipping defects using sensor and light emitting units. An apparatus for inspecting semiconductor wafers includes a main body(110), a rotation roller(120), a sensor unit(130), and a light emitting unit. The main body includes a wafer cassette for mounting wafers. The rotation roller installed at the main body to contact with a periphery of the wafers rotates the wafers. The sensor unit adjacent to the rotation roller detects chipping which is formed in the respective wafers. The light emitting unit adjacent to the sensor unit radiates beams to the respective wafers with an angle.
Bibliography:Application Number: KR20070000578