METHOD FOR CHECKING SENSOR OPERATION, AND METHOD FOR CHECKING CORRECT POSITION FOR TEST TRAY USING THE SAME

A method for checking a sensor operation and a method for checking a correct position of a test tray by using the same are provided to prevent damage to a test tray, a semiconductor device, and test equipment in a test chamber by verifying accuracy of the sensor operation in the test chamber. A meth...

Full description

Saved in:
Bibliographic Details
Main Author PARK, YOUNG HWA
Format Patent
LanguageEnglish
Published 01.07.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
Online AccessGet full text

Cover

More Information
Summary:A method for checking a sensor operation and a method for checking a correct position of a test tray by using the same are provided to prevent damage to a test tray, a semiconductor device, and test equipment in a test chamber by verifying accuracy of the sensor operation in the test chamber. A method for checking an operation of a sensor for sensing a test tray in a test chamber of a test handler includes a process for determining an erroneous operation of the sensor when the sensor senses or does not sense the test tray over a predetermined time period(S100,S200,S300). The sensor includes an entrance sensor arranged at the entrance side of the test tray and an exit sensor arranged at the exit side of the test tray. If the entrance sensor and the exit sensor do not sense the test tray simultaneously although the test tray is positioned in an original position, it is determined one of the entrance sensor and the exit sensor is malfunctioning(S400,S600).
Bibliography:Application Number: KR20060133873