THREE-DIMENSIONAL MEASUREMENT PROBE

• Main Authors: KUBO KEISHI, FUNABASHI TAKANORI, YOSHIZUMI KEIICHI, MOCHIZUKI HIROYUKI
• Format: Patent
• Language: English
• Published: 25.06.2008
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TESTING

A three-dimensional measurement probe is provided to prevent error occurrence and damage to a thin film spring by including a magnetic circuit. A three-dimensional measurement probe includes a small-slide shaft(6), a small-air bearing, a magnetic force generator(95), a Z-stage, and a Z-stage driving unit. The small-slide shaft includes a stylus(5) and a magnetic pin(20). The stylus is installed on an end of the small-slide shaft to be in contact with the surface of an object. The magnetic pin is installed on the other end of the small-slide shaft. The small-air bearing is coupled to the small-slide shaft and has an air extractor(4). The air extractor forms compressed air membrane in a gap from the small-slide shaft. The magnetic force generator creates magnetic force for restricting rotational motion in a Z direction. The Z-stage detects displacement in the Z direction of the small-air bearing and guides the small-air bearing in the Z direction. The Z-stage driving unit moves the object and drives the Z-stage.