ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING THE SAME

• Main Authors: AHN, TAE JOON, KANG, SU HYUK
• Format: Patent
• Language: English
• Published: 16.06.2008
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

An array substrate in an LCD(Liquid Crystal Display) and a method for manufacturing the same are provided to remarkably improve a mobility characteristic by performing AMFC(Alternating Magnetic Field Crystallization) for a pure amorphous silicon layer. An array substrate in an LCD comprises a substrate(201), a gate electrode(205), a gate insulating layer(208), a semiconductor layer(232), a source electrode, and a drain electrode. The gate electrode is formed on the substrate. The gate insulating layer is formed on the gate electrode. The semiconductor layer, laid on the gate insulating layer, consists of the first polysilicon layer(214) and an impure polysilicon layer(226). The first polysilicon layer comprises the first area(214a) having the first thickness and the second area(214b) having the second thickness. The impure polysilicon layer, laid on the first polysilicon layer, is composed of two areas isolated from each other. Also the array substrate comprises the second polysilicon layer(230). The second polysilicon layer, an ohmic contact layer, is laid on the impure polysilicon layer, and consists of two areas isolated from each other. The source electrode and the drain electrode are formed on the second polysilicon layer. The first polysilicon layer and the impure polysilicon layer are crystallized through AMFC.