METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

A method for manufacturing a semiconductor device is provided to perform a heat treatment process without changing properties of an SOG(Spin On Glass) material by using a gradually rising temperature control method. A trench is formed on a semiconductor substrate. A liner insulating layer is formed...

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Bibliographic Details
Main Authors SHIM, JUNG MYOUNG, SEO, YOUNG HEE
Format Patent
LanguageEnglish
Published 04.04.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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