METHOD AND DEVICE FOR TRANSFERRING A PATTERN FROM A STAMP TO A SUBSTRATE

A device (1) for transferring a pattern (12) from a stamp (10) to a substrate (20) comprises a table (22) for supporting a substrate (20), a flexible stamp (10) and a movably arranged body (25) having a pressure chamber (27) for exerting pressure on a portion of the stamp (10), so that the portion i...

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Bibliographic Details
Main Authors DONA MARINUS J. J, DECRE MICHEL M. J, SCHNEIDER RONALD M
Format Patent
LanguageEnglish
Published 11.01.2008
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
LINING MACHINES
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MATERIALS THEREFOR
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
MICROSTRUCTURAL TECHNOLOGY
NANOTECHNOLOGY
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PRINTING
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
SEMICONDUCTOR DEVICES
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
SPRAYING OR ATOMISING IN GENERAL
STAMPING OR NUMBERING APPARATUS OR DEVICES
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:A device (1) for transferring a pattern (12) from a stamp (10) to a substrate (20) comprises a table (22) for supporting a substrate (20), a flexible stamp (10) and a movably arranged body (25) having a pressure chamber (27) for exerting pressure on a portion of the stamp (10), so that the portion is pushed toward the substrate (20) and contacts the substrate (20). During a pattern transferring process, the body (25) is moved. As a result, adjacent portions of the stamp (10) successively go through a process of being pushed toward the substrate (20), getting in contact with the substrate (20), and being allowed to move back in place again. In this way, it is achieved that the pattern (12) of the stamp (10) is transferred to the substrate (20), without the introduction of vibrations, so that the transfer of the pattern (12) takes place in a highly accurate fashion.
Bibliography:Application Number: KR20077025230