PACKAGES FOR ALKANES HAVING ULTRA-HIGH TRANSPARENCY AT 193 NM

Disclosed are packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelengths of about 193 nm. The packages holding the liquid alkanes can be stored for a period of months or longer with little or no loss of transparency and stability. Also disclosed are metho...

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Bibliographic Details
Main Authors FRENCH ROGER HARQUAIL, WHELAND ROBERT CLAYTON, QIU WEIMING, SHENG PENG, FINCHER CURTIS R
Format Patent
LanguageEnglish
Published 08.11.2007
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Summary:Disclosed are packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelengths of about 193 nm. The packages holding the liquid alkanes can be stored for a period of months or longer with little or no loss of transparency and stability. Also disclosed are methods for preparing the packages.
Bibliography:Application Number: KR20077022401