METHOD OF FORMING OXIDE AND OXIDE DEPOSITING APPARATUS

• Main Authors: LEE, JIN HO, HAN, YOUNG KI, KWAK, JAE CHAN
• Format: Patent
• Language: English
• Published: 10.10.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method for forming an oxide film and an oxide film depositing apparatus are provided to form an oxide film of a uniform thickness along the stepped portion of a lower structure having a minute pattern and to obtain a high step coverage characteristic. A method for forming an oxide film includes th...