APPARATUS AND METHOD FOR PREVENTION SAGGING OF MASK

An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed betwee...

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Main Author JEONG, TAE KYUN
Format Patent
LanguageEnglish
Published 20.09.2007
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Abstract An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed between the mask and the shield glass. A pressure control unit is installed at the mask holder in order to prevent a sagging effect of the mask by controlling pressure of a space between the mask and the shield glass according to a sagging state of the mask. The mask holder includes an upper supporting part for supporting the shield glass, a lower supporting part for supporting the mask, and a lateral supporting part connected between the upper supporting part and the lower supporting part in order to prepare the space between the shield glass and the mask.
AbstractList An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed between the mask and the shield glass. A pressure control unit is installed at the mask holder in order to prevent a sagging effect of the mask by controlling pressure of a space between the mask and the shield glass according to a sagging state of the mask. The mask holder includes an upper supporting part for supporting the shield glass, a lower supporting part for supporting the mask, and a lateral supporting part connected between the upper supporting part and the lower supporting part in order to prepare the space between the shield glass and the mask.
Author JEONG, TAE KYUN
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Snippet An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title APPARATUS AND METHOD FOR PREVENTION SAGGING OF MASK
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