APPARATUS AND METHOD FOR PREVENTION SAGGING OF MASK
An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed betwee...
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Main Author | |
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Format | Patent |
Language | English |
Published |
20.09.2007
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Subjects | |
Online Access | Get full text |
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Abstract | An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed between the mask and the shield glass. A pressure control unit is installed at the mask holder in order to prevent a sagging effect of the mask by controlling pressure of a space between the mask and the shield glass according to a sagging state of the mask. The mask holder includes an upper supporting part for supporting the shield glass, a lower supporting part for supporting the mask, and a lateral supporting part connected between the upper supporting part and the lower supporting part in order to prepare the space between the shield glass and the mask. |
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AbstractList | An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed between the mask and the shield glass. A pressure control unit is installed at the mask holder in order to prevent a sagging effect of the mask by controlling pressure of a space between the mask and the shield glass according to a sagging state of the mask. The mask holder includes an upper supporting part for supporting the shield glass, a lower supporting part for supporting the mask, and a lateral supporting part connected between the upper supporting part and the lower supporting part in order to prepare the space between the shield glass and the mask. |
Author | JEONG, TAE KYUN |
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Snippet | An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | APPARATUS AND METHOD FOR PREVENTION SAGGING OF MASK |
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