APPARATUS AND METHOD FOR PREVENTION SAGGING OF MASK

An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed betwee...

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Bibliographic Details
Main Author JEONG, TAE KYUN
Format Patent
LanguageEnglish
Published 20.09.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An apparatus and a method for preventing a sagging effect of a mask are provided to control pressure between the mask and a shield glass by using a pressure control unit. A mask pattern is formed on a mask(120). A shield glass(160) is installed opposite to the mask. A mask holder is installed between the mask and the shield glass. A pressure control unit is installed at the mask holder in order to prevent a sagging effect of the mask by controlling pressure of a space between the mask and the shield glass according to a sagging state of the mask. The mask holder includes an upper supporting part for supporting the shield glass, a lower supporting part for supporting the mask, and a lateral supporting part connected between the upper supporting part and the lower supporting part in order to prepare the space between the shield glass and the mask.
Bibliography:Application Number: KR20060024464