APPARATUS OF UNLOADING A SUBSTRATE AND METHOD OF UNLOADING THE SAME

An apparatus and method for unloading a substrate is provided to improve the productivity of a substrate for a display device by reducing a defective in a substrate unloading process and to use electricity generating unit. A substrate is loaded on a stage(100), and a pin(110) is engaged to the stage...

Full description

Saved in:
Bibliographic Details
Main Authors LEE, MI HEE, KIM, JONG WOOK, KIM, IN DUK, PARK, BYOUNG KWEN, JUNG, WOO NAM, LEE, GUN HO, KIM, JIN HEE, PARK, HEE MIN, YOON, HONG SIK, SHIN, HYUN BO, KIM, MI SUN, KIM, KYOUNG HYO, LEE, SANG KEUN, IM, JIN SEUNG
Format Patent
LanguageEnglish
Published 20.09.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:An apparatus and method for unloading a substrate is provided to improve the productivity of a substrate for a display device by reducing a defective in a substrate unloading process and to use electricity generating unit. A substrate is loaded on a stage(100), and a pin(110) is engaged to the stage, and protrudes towards the substrate in response to a control signal from an external. An electrostatic potential sensor(200) is located on the substrate to detect a potential of the substrate. A controller(300) generates a potential signal to the stage in response to a potential sensing signal output from the electrostatic potential sensor. An electricity generating unit(120) is engaged to the stage to generate static electricity in response to the potential signal.
Bibliography:Application Number: KR20060024330