METHOD OF MANUFACTURING A MEMORY DEVICE

• Main Authors: SON, GIL HWAN, YOO, DAE HAN, YOU, YOUNG SUB, LEE, KONG SOO, HAN, JAE JONG, HYUNG, YONG WOO, LEE, CHANG HOON, NOH, JU HEE
• Format: Patent
• Language: English
• Published: 11.09.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A gas distribution plate for uniform injection of gas is provided to improve a process nonuniformity phenomenon where the center part of a substrate becomes thicker than the peripheral part of the substrate, by increasing the fluid conductance in the peripheral part of a gas distribution plate as co...