APPARATUS FOR TESTING SEMICONDUCTOR DEVICE WAFER
A wafer tester is provided to prevent spark discharge from happening at a tip of a probe and a chip region of a wafer by using a chamber isolating a chip region of the wafer and the probe from an atmosphere. A test station(100) outputs a given electric signal, and tests a chip mounted on a wafer(W)...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
06.09.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A wafer tester is provided to prevent spark discharge from happening at a tip of a probe and a chip region of a wafer by using a chamber isolating a chip region of the wafer and the probe from an atmosphere. A test station(100) outputs a given electric signal, and tests a chip mounted on a wafer(W) using the electric signal. A probe station(200) has a chamber(300) enclosing the wafer and a probe contacting a surface of the wafer to receive the electric signal and apply it to a chip testing region of the wafer. The probe station has a chuck(220) supporting the wafer, and a probe card(240) with at least one probe contacted with the chip testing region. |
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Bibliography: | Application Number: KR20060019893 |