APPARATUS FOR TESTING SEMICONDUCTOR DEVICE WAFER

A wafer tester is provided to prevent spark discharge from happening at a tip of a probe and a chip region of a wafer by using a chamber isolating a chip region of the wafer and the probe from an atmosphere. A test station(100) outputs a given electric signal, and tests a chip mounted on a wafer(W)...

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Bibliographic Details
Main Authors MOON, BYUNG JUN, KIM, DUK GEUM, CHOI, JI MAN, LEE, IN CHEOL, NAM, JU HYUN
Format Patent
LanguageEnglish
Published 06.09.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A wafer tester is provided to prevent spark discharge from happening at a tip of a probe and a chip region of a wafer by using a chamber isolating a chip region of the wafer and the probe from an atmosphere. A test station(100) outputs a given electric signal, and tests a chip mounted on a wafer(W) using the electric signal. A probe station(200) has a chamber(300) enclosing the wafer and a probe contacting a surface of the wafer to receive the electric signal and apply it to a chip testing region of the wafer. The probe station has a chuck(220) supporting the wafer, and a probe card(240) with at least one probe contacted with the chip testing region.
Bibliography:Application Number: KR20060019893