LASER SCANNING APPARATUS AND METHOD FOR ALIGNING OF SUBSTRATE USING THE SAME
A laser irradiating apparatus and a driving method thereof are provided to improve a manufacturing efficiency of a display device by enabling a user to manually change an arrangement of a mask when changing the model. A laser irradiating apparatus includes a substrate, a mask, a substrate stage(11),...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
01.08.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A laser irradiating apparatus and a driving method thereof are provided to improve a manufacturing efficiency of a display device by enabling a user to manually change an arrangement of a mask when changing the model. A laser irradiating apparatus includes a substrate, a mask, a substrate stage(11), a laser head(16), and at least one arranging unit(15). First and second alignment marks are formed on the substrate. The substrate stage supports the substrate. At least one guide pin for arranging the substrates is formed on the substrate stage. The laser head is supported and moved by the laser head guide on the substrate sealing unit and includes a calculator for arranging the substrate sealing unit with respect to the region where the laser is irradiated. The arranging unit is attached to one surface of the laser head guide and includes a CCD(Charge Coupled Device) for measuring the position of the substrate and the mask. The arranging unit arranges the substrate and the mask. |
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Bibliography: | Application Number: KR20060008803 |