APPARATUS FOR PROVIDING CHEMICAL LIQUID

An apparatus for supplying a chemical liquid is provided to prevent density hunting due to insufficiency of chemical liquid by filling automatically a chemical liquid receptacle with the chemical liquid. A diluent storage bath(100) stores a diluent. A plurality of chemical liquid supply units(200) s...

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Bibliographic Details
Main Authors KIM, WOO KOEN, JO, SUNG HO, JO, HYUN DO, CHOI, SU HYUN
Format Patent
LanguageEnglish
Published 10.07.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An apparatus for supplying a chemical liquid is provided to prevent density hunting due to insufficiency of chemical liquid by filling automatically a chemical liquid receptacle with the chemical liquid. A diluent storage bath(100) stores a diluent. A plurality of chemical liquid supply units(200) stores chemical liquid and includes controllers for controlling height of stored chemical liquid. A mixing receptacle(300) mixes the diluent of the diluent storage bath with the chemical liquid of the chemical liquid supply units in order to supply processing liquid to a processing bath. A density detection unit(400) measures the density of the processing liquid within the mixing receptacle.
Bibliography:Application Number: KR20060001435