SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device is provided to increase the effective channel length in a region where an isolation layer comes in contact with an active region by forming a gate line on a substrate wherein the gate line has protrusions at it both sides in a region where the isolation layer comes in contact...
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Main Author | |
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Format | Patent |
Language | English |
Published |
27.06.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device is provided to increase the effective channel length in a region where an isolation layer comes in contact with an active region by forming a gate line on a substrate wherein the gate line has protrusions at it both sides in a region where the isolation layer comes in contact with a gate line formed on a substrate in the active region. An isolation layer for defining a field region and an active region is formed in a substrate. A gate line has protrusions(P) at its both sides only in a region where the isolation layer comes in contact with the active region. The protrusion can be made of the same material as that of the gate line. A source/drain(S/D) is formed in the substrate exposed to both sides of the gate line. The width of the gate line in a region where the isolation layer comes in contact with the active region is greater than that of the gate line in a region except the region where the isolation layer comes in contact with the active region. |
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Bibliography: | Application Number: KR20050127711 |