SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

A semiconductor device is provided to increase the effective channel length in a region where an isolation layer comes in contact with an active region by forming a gate line on a substrate wherein the gate line has protrusions at it both sides in a region where the isolation layer comes in contact...

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Bibliographic Details
Main Author JUN, JUNG HAN
Format Patent
LanguageEnglish
Published 27.06.2007
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Summary:A semiconductor device is provided to increase the effective channel length in a region where an isolation layer comes in contact with an active region by forming a gate line on a substrate wherein the gate line has protrusions at it both sides in a region where the isolation layer comes in contact with a gate line formed on a substrate in the active region. An isolation layer for defining a field region and an active region is formed in a substrate. A gate line has protrusions(P) at its both sides only in a region where the isolation layer comes in contact with the active region. The protrusion can be made of the same material as that of the gate line. A source/drain(S/D) is formed in the substrate exposed to both sides of the gate line. The width of the gate line in a region where the isolation layer comes in contact with the active region is greater than that of the gate line in a region except the region where the isolation layer comes in contact with the active region.
Bibliography:Application Number: KR20050127711