PLASMA TREATMENT APPARATUS AND METHOD OF PLASMA TREATMENT

The functional deterioration of plasma treatment apparatus attributed to a reduction of plasma generation chamber caused by reducing plasma produced from introduced process gas is prevented to thereby realize prolongation of the service life of members brought into contact with reducing plasma, such...

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Bibliographic Details
Main Author YAMAZAKI KATSUHIRO
Format Patent
LanguageEnglish
Published 12.06.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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