MOVABLE TRANSFER CHAMBER AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME

A movable transfer chamber and a substrate processing apparatus with the same are provided to use efficiently a predetermined space and to reduce fabrication costs by arranging variously a process chamber and a loadlock chamber. A transfer chamber(100) includes a substrate transfer unit at an inner...

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Bibliographic Details
Main Authors CHOI, JAE WOOK, KIM, YOUNG ROK
Format Patent
LanguageEnglish
Published 13.03.2007
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Summary:A movable transfer chamber and a substrate processing apparatus with the same are provided to use efficiently a predetermined space and to reduce fabrication costs by arranging variously a process chamber and a loadlock chamber. A transfer chamber(100) includes a substrate transfer unit at an inner portion and an exit at one side. The transfer chamber is capable of being transferred to a process chamber(200). The transfer chamber is connected with the process chamber in order to exchange substrates. The transfer chamber is transferred to an aiming position by using a transfer chamber moving unit. A plurality of process chambers are arranged at one side or both sides of the transfer chamber moving unit.
Bibliography:Application Number: KR20050114011