HEATING CRUCIBLE AND DEPOSIT APPARATUS UTILIZING THE SAME

• Main Authors: KIM, HYUNG MIN, CHI, CHANG SOON, NAMGOONG, SUNG TAE, KEUM, JI HWAN, CHO, YOUNG SOO
• Format: Patent
• Language: English
• Published: 12.03.2007
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A heating crucible and a deposit apparatus utilizing the same are provided to eliminate a dim phenomenon during an imaging and a pattern error while forming a deposition pattern on a substrate by preventing an organic compound mass from being deposited on the substrate. In a heating crucible of a deposit apparatus, a main body(310) comprises a space(321) accommodating an organic compound and a nozzle unit(311) through which the evaporated organic compound is discharged. A first inner plate(330) installed in the main body(310) includes a first opening unit through which the evaporated organic compound passes to correspond to the nozzle unit(311). A second inner plate(340) installed on an upper face of the first inner plate inside the main body(310) includes a second opening unit(341) arranged to cross with the first opening unit of the first inner plate(330).