SEMICONDUCTOR WAFER EDGE TESTING APPARATUS AND WAFER EDGE TESTING METHOD

• Main Author: KIM, HOON HO
• Format: Patent
• Language: English
• Published: 03.01.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

A semiconductor wafer edge inspecting apparatus and a wafer edge inspecting method are provided to control properly an additional strip process on a wafer edge region by using an image pickup unit and a control unit. A semiconductor wafer edge inspecting apparatus includes a spin chuck for loading s...