AUTOMATIC REFERENCE POSITION TEACHING METHOD, AUTOMATIC POSITIONING METHOD, AND AUTOMATIC CARRYING METHOD FOR DISK-LIKE OBJECT, AUTOMATIC REFERENCE POSITION TEACHING DEVICE, AUTOMATIC POSITIONING DEVICE, AND AUTOMATIC CARRYING DEVICE FOR DISK-LIKE OBJECT USING THESE METHODS, AND AUTOMATIC SEMICONDUCTOR MANUFACTURING EQUIPMENT

• Main Authors: NAGAO TETSUYA, IKEDA TOSHIYUKI, SAKIYA FUMIO, SATO YASUHISA
• Format: Patent
• Language: English
• Published: 07.12.2006
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

An automatic reference position teaching method for disk-like object capable of increasing a productivity by automating reference position teachings at ports and a positioning in a stationary production process when equipment is started in a semiconductor manufacturing equipment having a positioning...