APPARATUS FOR PROCESSING A SUBSTRATE

• Main Authors: KIM, JONG HWAN, JUNG, SANG GEUN, JO, MOON SU
• Format: Patent
• Language: English
• Published: 02.11.2006
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

An apparatus for processing a substrate is provided to avoid heat loss generated by a gap between an inner tube and a boat by including a liner tube in the lower part of the inside of the inner tube so that the gap between the inner tube and the boat is reduced. A space for performing a process on a plurality of substrates(W) is supplied by an outer tube(202). An inner tube(204) has a hollow cylindrical type, installed in the outer tube. The substrates are positioned in the inner tube during the process. A heating part(210) heats the substrates positioned in the inner tube, adjoining the outer tube. A boat(212) includes rods and a heat insulation part(220) disposed on the rods. A plurality of slots for supporting the multiple stages of the substrate in the inner tube are formed in the rods. A liner tube(208) is disposed in the inner tube to receive the heat insulation part of the boat, reducing an interval between the heat insulation part and the inner tube. The liner tube has substantially the same height as the heat insulation part of the boat positioned in the inner tube.