METHOD OF FORMING TUNGSTEN FILM
A method of forming a tungsten film, capable of restricting voids and volcanoes as large as adversely affecting characteristics despite the small diameter of a buried hole, and providing good burying characteristics. When forming a tungsten film on the surface of an object of treating (W) in a vacuu...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
13.09.2006
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!