COATING METHOD AND APPARATUS

PROBLEM TO BE SOLVED: To simply uniformalize the discharge quantity of a liquid from a plurality of nozzles arranged side by side. SOLUTION: In the coating method of applying the liquid discharged from the plurality of the nozzles 22 arranged side by side on a substrate 1, the discharge quantity fro...

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Bibliographic Details
Main Authors TSURUOKA YASUTSUGU, SHIGEYAMA AKIHIRO
Format Patent
LanguageEnglish
Published 01.06.2006
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Summary:PROBLEM TO BE SOLVED: To simply uniformalize the discharge quantity of a liquid from a plurality of nozzles arranged side by side. SOLUTION: In the coating method of applying the liquid discharged from the plurality of the nozzles 22 arranged side by side on a substrate 1, the discharge quantity from each nozzle is uniformized by equalizing the diameter D of a discharge hole 22A of each nozzle 22 and adjusting the length L of the discharge hole 22A. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: KR20050113426