SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
The device has a substrate with several active regions (102a, 102b). Each region has a length in a direction of an axis and width in the direction of another axis, where the length is larger than the width. The regions are provided in slots, where regions in adjacent slots are displaced in the direc...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
12.04.2006
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Subjects | |
Online Access | Get full text |
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Summary: | The device has a substrate with several active regions (102a, 102b). Each region has a length in a direction of an axis and width in the direction of another axis, where the length is larger than the width. The regions are provided in slots, where regions in adjacent slots are displaced in the direction of the latter axis. A field separation layer is provided at the substrate, where the layer surrounds the regions. |
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Bibliography: | Application Number: KR20040080460 |