STANDARD SAMPLE FOR TEM(TRANSMISSION ELECTRON MICROSCOPE) ELEMENTAL MAPPING AND TEM ELEMENTAL MAPPING METHOD USING THE SAME

A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having ox...

Full description

Saved in:
Bibliographic Details
Main Authors SHOHEI TERADA, SONG, SE AHN, PARK, JONG BONG, PARK, GYEONG SU, TATSUMI HIRANO, KAJI KAZUTOSHI
Format Patent
LanguageEnglish
Published 25.07.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1-5 nm or 6-10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
Bibliography:Application Number: KR20040003253