PRECISION MACHINING STAGE EQUIPMENT

• Main Authors: ONOZAKI JUNICHI, KANO YOSHIO
• Format: Patent
• Language: English
• Published: 18.07.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

Precision machining stage equipment, wherein a movable table for supporting a work is allowed to move in any direction in a same plane by a table holding mechanism, fed in the same plane by an electromagnetic drive means, and stopped at any position in the same plane by an electromagnetic braking mechanism, the electromagnetic drive means feeds the movable table by a magnetic interaction between driven magnets and drive coils, and the electromagnetic braking mechanism having braking magnets and non-magnetic and conductive braking plates produces a braking force based on the magnetic action of a magnetic force by an eddy current produced in the braking plates and a magnetic force of the braking magnets according to the movement of the movable table by the set of the braking magnets and the braking plates.