HIGH FLOW RATE BUBBLER SYSTEM AND METHOD
A high flow rate bubbler system and method are provided for producing a stable, easily controllable source of chemical vapors to a downstream process. The bubbler system is equipped with a vaporizer unit connected to its gas outlet tube. This vaporizer unit slows the gas velocity to enhance settling...
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Main Author | |
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Format | Patent |
Language | English |
Published |
12.05.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A high flow rate bubbler system and method are provided for producing a stable, easily controllable source of chemical vapors to a downstream process. The bubbler system is equipped with a vaporizer unit connected to its gas outlet tube. This vaporizer unit slows the gas velocity to enhance settling of entrained droplets and contacts the exiting gas with a high thermal mass, heated surfaces to promote heat transfer and evaporation of the entrained droplets. |
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Bibliography: | Application Number: KR20047008360 |