METHOD FOR FABRICATING SOFT MOLD FOR FORMATION OF MICROPATTERN IN ELECTRONIC CIRCUIT AND SOFT MOLD SYSTEM INCLUDING THE SOFT MOLD

PURPOSE: Provided are a soft mold having magnetic control device used in soft lithography and soft molding for forming micropattern in electronic circuit, especially, for the soft mold sufficient to adapt in mass-production, and automated soft mold system including the same. CONSTITUTION: The method...

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Bibliographic Details
Main Author KIM, JIN OOK
Format Patent
LanguageEnglish
Korean
Published 10.03.2005
Edition7
Subjects
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Summary:PURPOSE: Provided are a soft mold having magnetic control device used in soft lithography and soft molding for forming micropattern in electronic circuit, especially, for the soft mold sufficient to adapt in mass-production, and automated soft mold system including the same. CONSTITUTION: The method comprises steps of forming a master with any pattern; pouring first elastomer on top of the master(A) to form pre-polymer; curing the pre-polymer layer(104) in first curing process; forming magnetized material on top portion of the cured pre-polymer; pouring second elastomer on top of the pre-polymer layer containing the magnetized material then completely curing the pre-polymer layer in second curing process; and releasing the completely cured polymer layer including the magnetized material. The produced soft mold has unevenness on one side and the magnetized material parallel to the unevenness side.
Bibliography:Application Number: KR20030061010