METHOD FOR MANUFACTURING IMAGE SENSOR TO IMPROVE SURFACE ROUGHNESS USING METAL SPACER

PURPOSE: A method for manufacturing an image sensor is provided to restrain the surface roughness by forming a metal spacer at both sidewalls of metal lines. CONSTITUTION: Photodiode patterns(102R,102G,102B) are formed on a substrate(100). A plurality of ILDs(Interlayer Dielectrics)(104,110,114,118)...

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Bibliographic Details
Main Author SHIN, KANG SUP
Format Patent
LanguageEnglish
Korean
Published 04.03.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A method for manufacturing an image sensor is provided to restrain the surface roughness by forming a metal spacer at both sidewalls of metal lines. CONSTITUTION: Photodiode patterns(102R,102G,102B) are formed on a substrate(100). A plurality of ILDs(Interlayer Dielectrics)(104,110,114,118) and a plurality of metal lines(106,112,116,120) are alternately formed on the resultant structure. Metal spacers are formed at both sidewalls of the metal lines, respectively. Then, a condensing part including a color filter and a microlens is formed on the resultant structure.
Bibliography:Application Number: KR20030057657