CONTROL SYSTEM, LITHOGRAPHY APPARATUS, DEVICE FABRICATION METHOD AND ITS FABRICATED DEVICE, ESPECIALLY INCLUDING A PID CONTROLLER FOR POSITION SETTING UNIT
PURPOSE: A control system and a lithography apparatus and a device fabrication method and device of the same are provided to improve speed and accuracy of a moving control system. CONSTITUTION: According to a control system for position setting unit, a setpoint generator(10) calculates a current or...
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Main Author | |
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Format | Patent |
Language | English Korean |
Published |
18.11.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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