CONTROL SYSTEM, LITHOGRAPHY APPARATUS, DEVICE FABRICATION METHOD AND ITS FABRICATED DEVICE, ESPECIALLY INCLUDING A PID CONTROLLER FOR POSITION SETTING UNIT

• Main Author: DAMS JOHANNES ADRIANUS ANTONIUS THEODORUS
• Format: Patent
• Language: English; Korean
• Published: 18.11.2004
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; HOLOGRAPHY; MATERIALS THEREFOR; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

PURPOSE: A control system and a lithography apparatus and a device fabrication method and device of the same are provided to improve speed and accuracy of a moving control system. CONSTITUTION: According to a control system for position setting unit, a setpoint generator(10) calculates a current or a voltage to be supplied to the position setting unit according to a required position of the position setting unit and/or its derivatives. A controller(4) outputs a signal to be supplied to the position setting unit according to the required current or voltage. A sensor(12) measures the present current or voltage value. The controller is connected to a feedback loop to have an error between the required current or voltage and the measured current or voltage as an input. An adder unit(8) adds a feedforward value to an output of the controller before being supplied to the position setting unit. And a calculation unit calculate the feedforward value using dynamic and electrical characteristics of the position setting unit and the required position and/or its derivatives of the position setting unit.