CONTROL SYSTEM, LITHOGRAPHY APPARATUS, DEVICE FABRICATION METHOD AND ITS FABRICATED DEVICE, ESPECIALLY INCLUDING A PID CONTROLLER FOR POSITION SETTING UNIT
PURPOSE: A control system and a lithography apparatus and a device fabrication method and device of the same are provided to improve speed and accuracy of a moving control system. CONSTITUTION: According to a control system for position setting unit, a setpoint generator(10) calculates a current or...
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Main Author | |
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Format | Patent |
Language | English Korean |
Published |
18.11.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A control system and a lithography apparatus and a device fabrication method and device of the same are provided to improve speed and accuracy of a moving control system. CONSTITUTION: According to a control system for position setting unit, a setpoint generator(10) calculates a current or a voltage to be supplied to the position setting unit according to a required position of the position setting unit and/or its derivatives. A controller(4) outputs a signal to be supplied to the position setting unit according to the required current or voltage. A sensor(12) measures the present current or voltage value. The controller is connected to a feedback loop to have an error between the required current or voltage and the measured current or voltage as an input. An adder unit(8) adds a feedforward value to an output of the controller before being supplied to the position setting unit. And a calculation unit calculate the feedforward value using dynamic and electrical characteristics of the position setting unit and the required position and/or its derivatives of the position setting unit. |
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Bibliography: | Application Number: KR20040032958 |