POLISHING AGENT SLURRY COMPRISING POLISHING MICROPARTICLE, COLLOIDAL OXIDE MICROPARTICLE AND DISPERSING MEDIUM, AND PREPARATION METHOD OF SUBSTRATE USING THE SLURRY

• Main Authors: CHO TOSHITSURA, ASO TOSHIAKI, IWASHIRO AKIRA
• Format: Patent
• Language: English; Korean
• Published: 15.11.2004
• Edition: 7
• Subjects: ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; DRESSING OR CONDITIONING OF ABRADING SURFACES; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GLASS; GRINDING; JOINING GLASS TO GLASS OR OTHER MATERIALS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MINERAL OR SLAG WOOL; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; PERFORMING OPERATIONS; POLISHES; POLISHING; POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH; SEMICONDUCTOR DEVICES; SKI WAXES; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TRANSPORTING

PURPOSE: Provided are a polishing agent slurry which is improved in dispersion stability for a long time, has a good re-dispersion and is free from an organic dispersant, and a method for preparing a substrate by using the slurry. CONSTITUTION: The polishing agent slurry comprises a polishing microparticle comprising at least one kind of oxide; a colloidal oxide microparticle having an average diameter smaller than that of the polishing microparticle; and a dispersing medium for dispersing the polishing microparticle and the colloidal oxide microparticle. Preferably the polishing microparticle has an average diameter (Dp) of 100-5,000 nm and the colloidal oxide microparticle has an average diameter (Dc) of 10-300 nm, and the ratio of Dp/Dc is 10 or less. Preferably the polishing microparticle is cerium oxide; the colloidal oxide microparticle is colloidal silica; and the dispersing medium is water or an aqueous dispersing medium mainly comprising water.