WAFER HANDLER OF ION INJECTION APPARATUS HAVING LOCK PIN INSERTED ALONG WITH ROUND-PROCESSED PROTRUSION SURFACE

PURPOSE: A wafer handler of an ion injection apparatus is provided to prevent a process interruption and a wafer breakage by inserting a lock pin along with a surface of a protrusion which is round-processed. CONSTITUTION: A wafer handler of an ion injection apparatus includes a wafer transport arm(...

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Bibliographic Details
Main Authors CHAE, SEUNG WON, KIM, SU MAN, LIM, TAE SEOP
Format Patent
LanguageEnglish
Korean
Published 05.11.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A wafer handler of an ion injection apparatus is provided to prevent a process interruption and a wafer breakage by inserting a lock pin along with a surface of a protrusion which is round-processed. CONSTITUTION: A wafer handler of an ion injection apparatus includes a wafer transport arm(408), a support block(410), a rotation block, a guide block(404), and a position setter. The position setter includes a lock pin extended from a rear portion of the transport arm to the guide block and a lock pin guide(200). The lock pin guide is coupled with the lock pin during translation of the transport arm and is separated from the lock pin during rotation of the transport arm. The lock pin guide includes a base member coupled with the guide block and a pair of protrusions. The protrusions are exposed from a side of the base member. One side of the protrusion is round.
Bibliography:Application Number: KR20030025306